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Analysis of Frequency Locking in Optically Driven MEMS Resonators
Frequency Locking Optically Driven MEMS Resonators
2015/8/27
Thin, planar, radio frequency microelectromechan-ical systems (MEMS) resonators have been shown to self-oscillate in the absence of externalforcing whenilluminated by adirect cur-rent (dc) laser of su...
Analysis of Laser Power Threshold for Self Oscillation in Thermo-Optically Excited Doubly Supported MEMS Beams
MEMS Limit cycle Hopf bifurcation Numerical continuation Resonator
2015/8/26
An optically thin MEMS beam suspended above a substrate and illuminated with a CW laser forms an interferometer, coupling out-of-plane deflection of the beam to absorption within it. In turn, laser ab...